Tokyo Electron, Nvidia expand collaboration on agentic AI and robotics

16. Jul 2026

(AWP Alliance News) - Tokyo Electron Ltd and Nvidia Corp on Thursday announced they have expanded their collaboration to develop agentic artificial intelligence and robotics solutions, deepening work across digital twins, autonomous equipment and advanced simulation tools.

Tokyo Electron, a Tokyo-based manufacturer of semiconductor production equipment said it is using Santa Clara, California-headquartered chipmaker Nvidia's agent toolkit, including its NeMo and NemoClaw technologies, as well as the Isaac robotics platform, within its Epsira digital transformation framework.

Tokyo Electron said the tools will support faster and more accurate robot training, improved troubleshooting and more secure deployment of AI agents.

"This deeper collaboration will allow us to further leverage TEL's Epsira program to enhance our customers' productivity by enhancing manufacturing utilizing robotics maintenance and AI troubleshooting analysis," said Keiichi Matsushima, vice president and general manager, Corporate Development division at Tokyo Electron.

Epsira is designed to lift productivity by improving field efficiency, boosting yields and reducing downtime through data-driven maintenance and analysis.

Tokyo Electron added the strengthened partnership with Nvidia will help advance its goal of developing more autonomous equipment and enhancing stability across its operations.

Amit Goel, Nvidia senior director of Robotics and Edge AI Ecosystem, added: "TEL is bringing more intelligence to robotic maintenance, AI troubleshooting, and fab operations by leveraging Nvidia Agentic and Physical AI models and frameworks."

Shares in Tokyo Electron fell 5.8% to JPY69,940.00 in Tokyo on Thursday morning while Nvidia shares closed up 0.3% at USD212.50 in New York on Wednesday.

By Judy Amaca, Alliance News reporter Asia-Pacific

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